Micro diamond grinding has some constraints in wheel size and shape that limits achievable quality and geometry of micro parts and structured surfaces. Moreover, difficulty in grinding tool-making and preparation including truing and dressing also hampers the widespread application of diamond grinding into micro fabrication significantly. In [1], recently some innovative grinding tool concepts were proposed by Hoffmeister et al. [2] in which grinding wheels become endurable and slightly easier to make, and enhanced process stability was demonstrated with the assistance of ultrasonic vibration.

[1] Brinksmeier, E., Schmutz, J., 1997, Manufacture of Microstructures by Diamond Machining, Proc. of 9th IPES/UME 4 Int’I Conference, Braunschweig: 503-507

[2] Brinksmeier, E., Reimer, O., Sigel, R., 1994, Manufacture of Shock Wave Target-Foils for Nuclear Fusion Research, Proc. of UME 3, Aachen: 401-404