lithography

Photolithography (also called optical lithography) is a process used in microfabrication to selectively remove parts of a thin film (or the bulk of a substrate). It uses light to transfer a geometric pattern from a photomask to a light-sensitive chemical (photoresist) on the substrate. A series of chemical treatments then engraves the exposure pattern into the material underneath the photoresist.

Lithography

Picture (above) of a micro mixer. Technology used: photolithographic patterning of dry film resists laminated on a pre-drilled PMMA substrate.

Contact:

Fraunhofer IBMT

Fraunhofer-Institute for Biomedical Engineering
Head of Department Biomedical Microsystems
Dr. Thomas Velten
Ensheimer Strasse 48
66386 St. Ingbert
Germany

phone: +49 (0)6894 980-301
thomas.velten@ibmt.fraunhofer.de
IBMT homepage

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