material properties:
thermal stability up to 1723 °C
most relevant chemical non-resistance: HF
optical transparency: depends on degree of purity

process parameters:
temperature: roomtemp.

Contact:

Fraunhofer IBMT

Fraunhofer-Institute for Biomedical Engineering
Head of Department Biomedical Microsystems
Dr. Thomas Velten
Ensheimer Strasse 48
66386 St. Ingbert
Germany

phone: +49 (0)6894 980-301
thomas.velten@ibmt.fraunhofer.de
IBMT homepage