material properties:
thermal stability up to 1455 °C
most relevant chemical non-resistance: strong acids
optical transparency: opaque

process parameters:
temperature < 50 °C - 430 °C
layer thickness < 1 µm (in special cases up to 25 µm)

Contact:

Fraunhofer IBMT

Fraunhofer-Institute for Biomedical Engineering
Head of Department Biomedical Microsystems
Dr. Thomas Velten
Ensheimer Strasse 48
66386 St. Ingbert
Germany

phone: +49 (0)6894 980-301
thomas.velten@ibmt.fraunhofer.de
IBMT homepage