Photolithography (also called optical lithography) is a process used in microfabrication to selectively remove parts of a thin film (or the bulk of a substrate). It uses light to transfer a geometric pattern from a photomask to a light-sensitive chemical (photoresist) on the substrate. A series of chemical treatments then engraves the exposure pattern into the material underneath the photoresist.

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Fraunhofer-Institute for Biomedical Engineering
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phone: +49 (0)6894 980-301
thomas.velten@ibmt.fraunhofer.de
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