used materials: COC, PMMA, PC
dimensions:
min. structure wide: 20 µm
aspect ratio: 5
Contact:
IMTEK
University Freiburg, Institute of Microsystem Technology, IMTEK
Department for Process Technology
Dr. Andreas Schoth
Georges-Köhler Allee 103
79110 Freiburg
Germany
phone: +497612037355
Andreas.Schoth@imtek.uni-freiburg.de